An apparatus that reduces vibration generation and magnetic leakage,
wherein the apparatus is a motor, an articulated serial robot that has a
motor built in, a substrate loader that includes the articulated robot,
and a related exposure apparatus equipped with the substrate loader. The
motor includes a drive shaft to drive the motor; a rotor attached with
the shaft; and a stator that opposes the rotor and causes an
electromagnetic force to act between the rotor and the stator to drive
the drive shaft; an RC stator, for reaction force cancellation attached
with the stator; an RC rotor for reaction force cancellation, opposing
the RC stator; and a counterweight sleeve attached with the RC rotor,
wherein the reaction force, which is applied to the stator via the drive
shaft when the counterweight sleeve rotates in a direction opposite that
of the drive shaft, is cancelled.
