A MEMS device and a method for making a MEMS device are described. The MEMS device
includes a support member, an optical device, and a flexible member. In one aspect,
the flexible member is formed separately from the support member and the optical
device. In one aspect, the flexible member is dimensioned to enable flex in one
direction while maintaining stiffness in two orthogonal directions. In one fabrication
embodiment, the MEMS device is formed by etching an opening into the structural
layer to create a structural support member and an optical device. The structural
support member and optical device are mounted on a support substrate with a sacrificial
layer. A flexible member is conformally deposited over the structural support member
and the optical device and then etched. The sacrificial layer is partially etched
away to leave the structural support member anchored to the support substrate.
