A method and an apparatus for selectively applying correction to a process control.
Manufacturing data relating to the processing of a workpiece is acquired. The manufacturing
data includes metrology data relating to the processed workpiece. An adjustment
for at least a first or a second control input parameter is determined based upon
the manufacturing data. The first and second control input parameters are organized
to isolate the first control input parameter from the second control input parameter
for adjusting at least one of the first and the second control input parameters,
using a controller.
