The hinge (13) should preferably be formed to have a higher resistance
than ever against the pivoting of the mirror body (12) to effectively prevent
the hinge (13) from being damaged. By adopting a suitable one of a variety
of production steps as necessary, the hinge (13) can be formed more finely
and with a higher precision and thus the micro mirror unit can be produced more
easily in a shorter time. To this end, the hinge (13) is formed from a different
material, such as SiNx, from the mirror substrate material from which
the frame (11) and mirror body (12) are formed.
