The present invention provides systems and methods that facilitate performing
fabrication process. Critical parameters are valued collectively as a quality matrix,
which weights respective parameters according to their importance to one or more
design goals. The critical parameters are weighted by coefficients according to
information such as, product design, simulation, test results, yield data, electrical
data and the like. The invention then can develop a quality index which is a composite
"score" of the current fabrication process. A control system can then do comparisons
of the quality index with design specifications in order to determine if the current
fabrication process is acceptable. If the process is unacceptable, test parameters
can be modified for ongoing processes and the process can be re-worked and re-performed
for completed processes. As such, respective layers of a device can be customized
for different specifications and quality index depending on product designs and yields.
