A method and apparatus for formulating and controlling concentrations of deactivating
chemicals in a gas mixture inside a chamber. The gas mixture may include chemical
components that are deactivating chemicals, as well as chemical components that
are base chemicals, acting as a dilutant for the deactivating chemical, or as a
vehicle or carrier for the deactivating chemical. A capacitor is exposed to the
gas mixture, wherein the gas mixture comprises a dielectric material between the
plates of the capacitor. Permittivity of the dielectric is affected by the relative
concentrations of the chemical components, and thus a measurement of the capacitance
is used to determine the concentration levels of multiple chemical components in
the gas mixture.
