Two-phase microchannel heat exchangers for cooling integrated circuit (IC)
dies and cooling systems employing the same are disclosed. The heat exchangers
include thermal masses having a plurality of microchannels formed therein. In one
set of configurations, the IC die is coupled to a thermal mass having a plurality
of open microchannels such that a hermetic seal is formed between the die and the
bases of the microchannel walls, thus forming a plurality of closed microchannels.
In another set of configurations, a separate microchannel heat exchanger is thermally
coupled to an IC die and operatively coupled to the IC die via coupling to a substrate
on which the IC die is mounted. The microchannel heat exchangers may be employed
in a closed loop cooling system includes a pump and a heat rejecter. The microchannels
are configured to support two-phase heat transfer using a working fluid such as water.