In a cantilever sensor and a fabrication thereof, by forming piezoelectric films
on the same surface, it is possible to sense various information by an electric
measuring method. The cantilever sensor comprises a first silicon nitride film
formed onto the top surface of a silicon substrate; a silicon oxide film formed
onto the first silicon nitride film; a lower electrode formed onto the silicon
oxide film; a first piezoelectric film and a second piezoelectric film formed onto
the lower electrode, the second piezoelectric film formed out of contact with the
first piezoelectric film; an upper electrode respectively formed onto the first
and second piezoelectric films; a protecting film formed onto the silicon oxide
film, the lower electrode, the first and second piezoelectric films and the upper
electrode; a first and a second openings respectively formed on the protecting
film on the upper electrode and the protecting film on the lower electrode; a first
and a second contact pads respectively formed at the first and second openings;
a T-shaped sensing portion formed at the end of a cantilever; a second silicon
nitride film formed on the bottom surface of the silicon substrate.