The invention provides a pump which has reduced pressure loss by using
fewer mechanical on-off valves, which has increased reliability, which
can be used under a high load pressure, which can be driven at a high
frequency, and which has good drive efficiency by increasing discharge
fluid volume per pumping period. A circular diaphragm, disposed at the
bottom portion of a case, has its outer peripheral edge secured to and
supported by the case. A piezoelectric device to move the diaphragm is
disposed at the bottom surface of the diaphragm. A space between the
diaphragm and the top wall of the case is a pump chamber. An inlet flow
path, having a check valve serving as a fluid resistor disposed thereat,
and an outlet flow path, which opens to the pump chamber during operation
of the pump, open towards the pump chamber. In the pump, driving of the
piezoelectric device is controlled so that an average displacement
velocity in a pump chamber volume reducing step of the diaphragm becomes
a velocity at which the diaphragm reaches the
reached-displacement-position in a time equal to or less than 1/2 and
equal to or greater than 1/10 of a natural vibration period T of fluid
inside the pump chamber and the outlet flow path.