A molecular pump has a casing having a gas inlet port and a gas discharge
port, a stator disposed within the casing, a shaft disposed in the casing
concentrically with the stator, a bearing rotatably supporting the shaft
for undergoing rotation relative to the stator in a preselected direction
of rotation, a rotor mounted on the shaft for rotation therewith in the
preselected direction of rotation, and a motor for rotationally driving
the shaft. A flange is connected to the casing at the gas inlet port. The
flange has at least one mounting hole for receiving a fastener, a first
elongated through-hole disposed in communication with the mounting hole,
and a second elongated through-hole spaced apart from the first elongated
through-hole in a direction toward a direction of rotation opposite to
the preselected direction of rotation to define between the first and
second elongated through-holes a deformable thin-wall portion for
undergoing deformation due to a shock resulting from a torque acting on
the casing in the preselected direction of rotation.