The invention relates to a semiconductor device with a heterojunction
bipolar, in particular npn, transistor with an emitter region (1), a base
region (2), and a collector region (3), which are provided with
respectively a first, a second, and a third connection conductor (4, 5,
6), while the bandgap of the base region (2) is lower than that of the
collector region (3) or of the emitter region (1), for example owing to
the use of a silicon-germanium alloy instead of pure silicon. Such a
device is very fast, but its transistor shows a relatively low BVceo. In
a device according to the invention, the emitter region (1) or the base
region (2) comprises a sub-region (1B, 2B) with a reduced doping
concentration, which sub-region (1B, 2B) is provided with a further
connection conductor (4B, 5B) which forms a Schottky junction with the
sub-region (1B, 2B). Such a device results in a transistor with a
particularly high cut-off frequency fT but with no or hardly any
reduction of the BVceo. In a preferred embodiment, the emitter region (1)
and its sub-region (1B), or the base region (2) and its sub-region (2B)
both border the surface of the semiconductor body (10) and the further
connection conductor (4B, 5B) forms part of the first or the second
connection conductor (4, 5), as applicable. The invention also comprises
a method of manufacturing a device according to the invention.