A memory cell has a trench formed into a surface of a semiconductor
substrate, and spaced apart source and drain regions with a channel
region formed therebetween. The source region is formed underneath the
trench, and the channel region includes a first portion extending
vertically along a sidewall of the trench and a second portion extending
horizontally along the substrate surface. An electrically conductive
floating gate is disposed in the trench adjacent to and insulated from
the channel region first portion. An electrically conductive control gate
is disposed over and insulated from the channel region second portion. An
erase gate is disposed in the trench adjacent to and insulated from the
floating gate. A block of conductive material has at least a lower
portion thereof disposed in the trench adjacent to and insulated from the
erase gate, and electrically connected to the source region.