Varactors are provided which have a high tunability and/or a high quality
factor associated therewith as well as methods for fabricating the same.
One type of varactor disclosed is a quasi hyper-abrupt base-collector
junction varactor which includes a substrate having a collector region of
a first conductivity type atop a subcollector region, the collector
region having a plurality of isolation regions present therein;
reach-through implant regions located between at least a pair of the
isolation regions; a SiGe layer atop a portion of the substrate not
containing a reach-through implant region, the SiGe layer having an
extrinsic base region of a second conductivity type which is different
from the first conductivity type; and an antimony implant region located
between the extrinsic base region and the subcollector region. Another
type of varactor disclosed is an MOS varactor which includes at least a
poly gate region and a well region wherein the poly gate region and the
well region have opposite polarities.