A transistor can be fabricated to exhibit reduced channel hot carrier
effects. According to one aspect of the present invention, a method for
fabricating a transistor structure includes implanting a first dopant
into a lightly doped drain (LDD) region to form a shallow region therein.
The first dopant penetrates the substrate to a depth that is less than
the LDD junction depth. A second dopant is implanted into the substrate
beyond the LDD junction depth to form a source/drain region. The
implantation of the second dopant overpowers a substantial portion of the
first dopant to define a floating ring in the LDD region that mitigates
channel hot carrier effects.