Methods of boosting the performance of bipolar transistor, especially SiGe
heterojunction bipolar transistors, is provided together with the
structure that is formed by the inventive methods. The methods include
providing a species-rich dopant region comprising C, a noble gas, or
mixtures thereof into at least a collector. The species-rich dopant
region forms a perimeter or donut-shaped dopant region around a center
portion of the collector. A first conductivity type dopant is then
implanted into the center portion of the collector to form a first
conductivity type dopant region that is laterally constrained, i.e.,
confined, by the outer species-rich dopant region.