The invention provides a polishing composition and a method of
chemically-mechanically polishing a substrate comprising a noble metal,
the polishing composition comprising (a) an oxidizing agent that oxidizes
a noble metal, (b) an anion selected from the group consisting of
sulfate, borate, nitrate, and phosphate, and (c) a liquid carrier. The
invention further provides a polishing composition and a method of
chemically-mechanically polishing a substrate comprising ruthenium, the
polishing composition comprising (a) an oxidizing agent that oxidizes
ruthenium above the +4 oxidation state, (b) a polishing additive selected
from the group consisting of metal sequestering polymers, metal
chelators, organic thiols, compounds that reduce ruthenium tetraoxide,
lactones, and .alpha.-hydroxycarbonyl compounds.