An assembly and method of making the same wherein the assembly
incorporates a rare-earth oxide film to form a [110] crystal lattice
orientation semiconductor film. The assembly comprises a substrate, a
rare-earth oxide film formed on the substrate, and a [110]-oriented
semiconductor film formed on the rare-earth oxide film. The rare-earth
oxide film having a [110] crystal lattice orientation. The substrate has
a [001] crystal lattice orientation.