The present invention provides a manufacturing method for an integrated
semiconductor structure and a corresponding integrated semiconductor
structure. The manufacturing method comprises the steps of: providing a
semiconductor substrate (1) having an upper surface (O) and having first
and second transistor regions (T1, T2); wherein said first transistor
region (T1) is a n-MOSFET region and second transistor region (T2) is a
p-MOSFET region; forming a gate structure on said first and second
transistor region (T1, T2) including at least one gate dielectric layer
(2, 3, 10c, 17, 25) and one gate layer (4; 35; 50, 60) in each of said
first and second transistor regions (T1, T2); wherein said gate layer (4;
35; 60) in said second transistor region (T2) is made of negatively doped
polysilicon; wherein said at least one gate dielectric layer (2, 10c, 17)
in said first transistor region (T1) comprises a first dielectric layer
(2, 10c, 17); wherein said at least one gate dielectric layer (2, 3, 10c,
25, 25') in said second transistor region (T2) comprises an interfacial
dielectric layer (2; 25; 25') located adjacent to said gate layer (4; 35;
60) in said second transistor region (T2), which interfacial dielectric
layer (2; 25; 25') forms an Al.sub.2O.sub.3 containing interface on said
gate layer (4; 35; 60) in said second transistor region (T2) causing a
Fermi-pinning effect; and wherein said first transistor region (T1) does
not include said interfacial dielectric layer (2; 25; 25').