The invention is directed to a method and an arrangement for the
plasma-based generation of intensive short-wavelength radiation,
particularly EUV radiation. The object of the invention, to find a novel
possibility for plasma-based generation of intensive soft x-radiation,
particularly EUV radiation, which permits efficient energy conversion in
the desired spectral band with high repetition frequency (several kHz) of
the plasma excitation, minimized emission of debris and low erosion of
the nozzle of the target generator, is met according to the invention in
that an additional energy beam is directed on the target flow spatially
in advance of its interaction with the high-energy beam, the target flow
being acted upon by this additional energy beam with substantially weaker
energy pulses compared to the high-energy beam in order to divide the
target flow into a first portion and at least one second portion, wherein
the target flow is excited at an interaction point within the second
portion by the high-energy beam for generating a hot, radiating plasma,
and the second portion is decoupled from the first portion and therefore
from the target generator in such a way that a hydrodynamic disturbance
generated in the second portion by the pulse of the high-energy beam is
transmitted into the first portion only negligibly.