A lithographic apparatus is disclosed. The apparatus includes an
illumination system that provides a beam of radiation, and a support
structure that supports a patterning structure. The patterning structure
is configured to impart the beam of radiation with a pattern in its
cross-section. The apparatus also includes a substrate support that
supports a substrate, a projection system that projects the patterned
beam onto a target portion of the substrate, and a debris-mitigation
system that mitigates debris particles which are formed during use of at
least a part of the lithographic apparatus. The debris-mitigation system
is arranged to apply a magnetic field so that at least charged debris
particles are mitigated.