Semiconductor integrated circuits that include thin film transistors
(TFTs) and methods of fabricating such semiconductor integrated circuits
are provided. The semiconductor integrated circuits may include a bulk
transistor formed at a semiconductor substrate and a first interlayer
insulating layer on the bulk transistor. A lower TFT may be on the first
interlayer insulating layer, and a second interlayer insulating layer may
be on the lower TFT. An upper TFT may be on the second interlayer
insulating layer, and a third interlayer insulating layer may be on the
upper TFT. A first impurity region of the bulk transistor, a first
impurity region of the lower TFT, and a first impurity region of the
upper TFT may be electrically connected to one another through a node
plug that penetrates the first, second and third interlayer insulating
layers.