Transistors and/or methods of fabricating transistors that include a
source contact, drain contact and gate contact are provided. In some
embodiments, a channel region is provided between the source and drain
contacts and at least a portion of the channel regions includes a hybrid
layer comprising semiconductor material. In particular embodiments of the
present invention, the transistor is a current aperture transistor. The
channel region may include pendeo-epitaxial layers or epitaxial laterally
overgrown layers. Transistors and methods of fabricating current aperture
transistors that include a trench that extends through the channel and
barrier layers and includes semiconductor material therein are also
provided.