The invention concerns the preparation of gallium nitride films by epitaxy
with reduced defect density levels. It concerns a method for producing a
gallium nitride (GaN) film by epitaxial deposition of GaN. The invention
is characterized in that it comprises at least a step of epitaxial
lateral overgrowth and in that it comprises a step which consists in
separating part of the GaN layer from its substrate by embrittlement
through direct ion implantation in the GaN substrate. The invention also
concerns the films obtainable by said method as well as the
optoelectronic and electronic components provided with said gallium
nitride films.