A CMP composition having: a fluid comprising water and at least one
oxidizing compound that produces free radicals when contacted with an
activator; and a plurality of particles having a surface and comprising
at least one activator selected from ions or compounds of Cu, Fe, Mn, Ti,
or mixtures thereof disposed on said surface, wherein at least a portion
of said surface comprises a stabilizer. Preferred activators are selected
from inorganic oxygen-containing compounds of B, W, Al, and P, for
example borate, tungstate, aluminate, and phosphate. The activators are
preferably ions of Cu or Fe. Surprisingly, as little as 0.2 ppm and 12
ppm of activator is useful, if the activator-containing particles are
suspended in the fluid as a slurry. Advantageously, certain organic
acids, and especially dihydroxy enolic acids, are included in an amount
less than about 4000 ppm. Advantageously, activator is coated onto
abrasive particles after the particles have been coated with stabilizer.