Epitaxial ferroelectric and magnetic recording structures having graded
lattice matching layers are disclosed. A single crystal material such as
Si may be used as a substrate material upon which the graded lattice
matching layers are deposited. The lattice matching layers may comprise
metals and metal alloys, or may comprise oxides doped with selected
elements or deposited under different oxygen pressures. A recording
layer, such as ferroelectric lead zirconium titanate or a magnetic Fe/Pt
multilayer structure, is deposited on the graded lattice matching layers.