Electron-beam-pumped semiconductor ultra-violet optical sources (ESUVOSs)
are disclosed that use ballistic electron pumped wide bandgap
semiconductor materials. The sources may produce incoherent radiation and
take the form of electron-beam-pumped light emitting triodes (ELETs). The
sources may produce coherent radiation and take the form of
electron-beam-pumped laser triodes (ELTs). The ELTs may take the form of
electron-beam-pumped vertical cavity surface emitting lasers (EVCSEL) or
edge emitting electron-beam-pumped lasers (EEELs). The semiconductor
medium may take the form of an aluminum gallium nitride alloy that has a
mole fraction of aluminum selected to give a desired emission wavelength,
diamond, or diamond-like carbon (DLC). The sources may be produced from
discrete components that are assembled after their individual formation
or they may be produced using batch MEMS-type or semiconductor-type
processing techniques to build them up in a whole or partial monolithic
manner, or combination thereof.