An inductor integrated chip and fabrication method thereof is provided.
The inductor integrated chip includes a wafer; an inductor bonded on a
surface of the wafer; a circuit element formed on the surface of the
wafer and coupled to a first end of the inductor; a packaging wafer
connected to the surface of the wafer and packaging the inductor and the
circuit element; and a connecting electrode formed on the packaging wafer
and connected to a second end of the inductor. The method includes
forming an inductor and a circuit element on a surface of a wafer,
wherein the circuit element is coupled to a first end of the inductor;
forming a connecting electrode on a packaging wafer; and packaging the
inductor and the circuit element by joining the wafer and the packaging
wafer so as to connect the connecting electrode with a second end of the
inductor.