A semiconductor structure for preventing coupling noise in integrated
circuits and a method of forming the same are provided. The semiconductor
structure includes a signal-grounded seal ring. The seal ring includes a
plurality of metal lines, each in a respective metal layer and
surrounding a circuit region of the semiconductor chip, a plurality of
vias connecting respective metal lines, and a plurality of dielectric
layers isolating each metal layer from any other metal layers. The seal
ring may further include additional seal rings formed inside or outside
the seal ring. The semiconductor structure may include laser fuses and
protective rings. The protective rings are preferably signal grounded.
Cross talk between sub circuits in a chip can be reduced by forming a
seal ring extension between the sub circuits.