A pixel circuit substrate includes a first interlayer insulating film
which is made of an inorganic material at least in a source and drain
regions of a thin film transistor. A contact hole is formed in an area
above the source and drain regions of a thin film transistor in the first
interlayer insulating film. A wiring layer is formed on the first
interlayer insulating film, extends to an inner wall and a bottom surface
of the contact hole. On a top surface of the wiring layer is formed a
recess reflecting the shape of a contact hole. A second interlayer
insulating film is formed on the wiring layer, embedded in the recess and
has a flat top surface in an area above the thin film transistor. A
storage capacitor on the second interlayer insulating film is disposed in
the area above the thin film transistor.