A nonvolatile memory device with nanowire channel and a method for
fabricating the same are proposed, in which side etching is used to
shrink side walls of a side-gate to form a nanowire pattern, thereby
fabricating a nanowire channel on the dielectric of the side walls of the
side-gate. A nonvolatile memory device with nanowire channel and
dual-gate control can thus be achieved. This nonvolatile memory device
can enhance data writing and erasing efficiency, and also has the
capability of low voltage operation. Moreover, through a process of low
cost and easy steps, highly reproducible and mass producible fabrication
of nanowire devices can be accomplished.