The present invention is a method of manufacturing a quantum dot array having a plurality of columnar parts including a quantum dot on a substrate, the method comprising the steps of obliquely vapor-depositing a material constituting a first barrier layer to become an energy barrier against the quantum dot onto a surface of the substrate, so as to form a plurality of first barrier layers; obliquely vapor-depositing a material constituting the quantum dot with respect to the surface of the substrate, so as to form the quantum dots on the first barrier layers; and obliquely vapor-depositing a material constituting a second barrier layer to become an energy barrier against the quantum dot with respect to the surface of the substrate, so as to form the second barrier layers on the quantum dots.

 
Web www.patentalert.com

< Spacer process for on pitch contacts and related structures

< Microfabricated micro fluid channels

> Hybrid Schottky source-drain CMOS for high mobility and low barrier

> Hybrid resistor/FET-logic demultiplexer architecture design for hybrid CMOS/nanodevice circuits

~ 00615