A structure and a method for preventing latchup. The structure including: an I/O cell and an ESD protection circuit in a region of an integrated circuit chip containing logic circuits; an electrically conductive through via extending from a bottom surface of the substrate toward a top surface of the substrate between the I/O cell and an ESD protection circuit and at least one of the logic circuits.

 
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> Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame

> Microstructure, semiconductor device, and manufacturing method of the microstructure

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