The present invention discloses an electro-optical device support on a
substrate. The electro-optical device includes two face-to-face
freestanding membranes each supported near a top surface on one of two
bonded substrates for defining a resonant cavity between the two
membranes. Each of the substrates having an entire bulk-portion opposite
the cavity etched off as a bulk micro-machining opening extended from each
of the membranes through a bottom surface of the substrates.
