A flash memory structure having high coupling ratio and the manufacturing method
thereof are provided. The manufacturing method includes the following steps of
method of a flash memory having high coupling ratio, including steps of providing
a substrate, forming a first isolation structure and a second isolation structure
upon the substrate, forming a gate electrode upon the substrate between the first
isolation structure and the second isolation structure, to then further cover parts
of the first isolation structure and the second isolation structure, removing parts
of the first isolation structure and the second isolation structure uncovered by
the gate electrode for a specific range, forming a first silicon layer upon the
gate electrode, the first isolation structure and the second isolation structure,
removing parts of the first silicon layer to expose the gate electrode and parts
of the first isolation structure and the second isolation structure for forming
a flash memory floating gate structure having sidewalls, forming a dielectric layer
upon the floating gate structure, and forming a second silicon layer upon the dielectric layer.