A non-volatile memory device and method of manufacturing the same is
provided. A substrate is provided and then a trench is formed in the
substrate. Thereafter, a bottom oxide layer, a charge-trapping layer and
a top oxide layer are sequentially formed over the substrate and the
surface of the trench. A conductive layer is formed over the top oxide
layer filling the trench. The conductive layer is patterned to form a
gate over the trench. The top oxide layer, the charge-trapping layer and
the bottom oxide layer outside the gate are removed. A source/drain
doping process is carried out. Because the non-volatile memory device is
manufactured within the trench, storage efficiency of the device is
improved through an increase in the coupling ratio. Furthermore, more
charges can be stored by increasing the depth of the trench.