A method and system for masking a surface to be etched is described. The
method includes the operation of heating a phase-change masking material
and using a droplet source to eject droplets of a masking material for
deposit on a thin-film or other substrate surface to be etched. The
temperature of the thin-film or substrate surface is controlled such that
the droplets rapidly freeze after upon contact with the thin-film or
substrate surface. The thin-film or substrate is then treated to alter
the surface characteristics, typically by depositing a self assembled
monolayer on the surface. After deposition, the masking material is
removed. A material of interest is then deposited over the substrate such
that the material adheres only to regions not originally covered by the
mask such that the mask acts as a negative resist. Using such techniques,
feature sizes of devices smaller than the smallest droplet printed may be
fabricated.